FACILITY

N2 Cabinet
ALD #1
ALD #2
Sputter
Furnace #1
Furnace #2
Forced Convection Oven
Vacuum Oven
Optical Microscope
Force Gauge & Automatic stand system
Probe station & Semiconductor Analyzer
Hume Hood, Spin coater, Sonicator, Hot p
Wet station (1 Acid, 2 Base)
DI generator & Reservoir
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대전광역시 유성구 대학로 291 (구성동373-1) 한국과학기술원(KAIST) 4405호

Korea Advanced Institute of Science and Technology, Guseong-dong, Yuseong-gu, Daejeon,

305-701 Rep. of KOREA

TEL : +82-42-350-3356 | FAX : +82-42-350-3310 

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