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FACILITY

N2 Cabinet
N2 Cabinet
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ALD #1
ALD #1
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ALD #2
ALD #2
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Sputter
Sputter
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Furnace #1
Furnace #1
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Furnace #2
Furnace #2
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Forced Convection Oven
Forced Convection Oven
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Vacuum Oven
Vacuum Oven
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Optical Microscope
Optical Microscope
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Force Gauge & Automatic stand system
Force Gauge & Automatic stand system
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Probe station & Semiconductor Analyzer
Probe station & Semiconductor Analyzer
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Hume Hood, Spin coater, Sonicator, Hot p
Hume Hood, Spin coater, Sonicator, Hot p
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Wet station (1 Acid, 2 Base)
Wet station (1 Acid, 2 Base)
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DI generator & Reservoir
DI generator & Reservoir
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