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FACILITY

N2 Cabinet
N2 Cabinet
ALD #1
ALD #1
ALD #2
ALD #2
Sputter
Sputter
Furnace #1
Furnace #1
Furnace #2
Furnace #2
Forced Convection Oven
Forced Convection Oven
Vacuum Oven
Vacuum Oven
Optical Microscope
Optical Microscope
Force Gauge & Automatic stand system
Force Gauge & Automatic stand system
Probe station & Semiconductor Analyzer
Probe station & Semiconductor Analyzer
Hume Hood, Spin coater, Sonicator, Hot p
Hume Hood, Spin coater, Sonicator, Hot p
Wet station (1 Acid, 2 Base)
Wet station (1 Acid, 2 Base)
DI generator & Reservoir
DI generator & Reservoir