FACILITY

N2 Cabinet

ALD #1

ALD #2

Sputter

Furnace #1

Furnace #2

Forced Convection Oven

Vacuum Oven

Optical Microscope

Force Gauge & Automatic stand system

Probe station & Semiconductor Analyzer

Hume Hood, Spin coater, Sonicator, Hot p

Wet station (1 Acid, 2 Base)

DI generator & Reservoir